奥地利EV Group（EVG）宣布，为形成手机用相机模块高耐热镜头，芬兰Heptagon Oy采用了EVG的光刻机(Mask Aligner)“IQ Aligner”。EVG高级副总裁Hermann Waltl表示，Heptagon采用的是支持300mm晶圆的装置。该装置已提供给Heptagon的制造子公司——新加坡He…

http://article.sichinamag.comhttp://article.sichinamag.com/2008-07/2008724024101.htm -- 2008-7-24 0:00:00

EV Group (EVG) announced the installation of an EVG640NIL precision alignment system tooled for nanoimprint lithography at Heptagon, a pioneer in the field of replicated refractive and diffractive micro-optical elements and subsystems. Nanoimprint Lithography (NIL) NIL is a next-generation lithography method that utilizes a l…

http://article.sichinamag.comhttp://article.sichinamag.com/2005-9/2006112143049ac1da.htm -- 2005-9-19 0:00:00