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A new simulation software application known as FabVi (Fab Virtual image) clones semiconductor equipment automation and AMHS automated material handling system interface functions for MES software validation testing to help maintain fab efficiency and equipment utilization. Developed by CIMAC, a software supplier spec…
http://article.sichinamag.comhttp://article.sichinamag.com/2008-07/2008710022314.htm -- 2008-7-10 0:00:00
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