应特格中国(Entegris China)将于2008年9月23日在上海举办应特格2008亚洲光刻应用技术研讨会,在此应特格公司将与参会者共同探讨交流光刻技术,并借此机会展示应特格光刻产品及技术。应特格公司盛情邀请业内工程师和经理人参加该研讨会,并进行技术交流(研讨会议程和邀请函见下)。
应特格2008亚洲光刻应用技术研讨会 Asia Photolithography Applications Seminar 2008
日期date:2008年9月23日 10:00-16:30 Sep 23, 2008, Shanghai, China
地点Venue:上海博雅酒店(张江高科技园区碧波路699号1楼宴会厅)
研讨会议程下载:
研讨会邀请函下载:
以下是研讨会主要内容(The following topics will be f
eatured) :
1) "Selection of Filter Membrane Material for Improved Photochemical Filtration" Entegris, Inc.
2) "Photolithography Materials for 130nm and 90nm Technology Node and the Development Trend for 65nm and Beyond", Rohm & Haas Microelectronics Technology Business Group, China
3) " AMC Absorption Mechanisms of Ion Exchange Resin Vs Treated Carbon for NH3 Removal Efficiency (RE) and Filter Lifetime in Photolithography Scanners ", Entegris, Inc.
4) "Global Update on the Reticle Time Dependent Defects" Entegris, Inc.
5) "Utilizing Networking Capability to Prevent Lithography-Induced Yield Excursions", Entegris, Inc.