DuPont Performance Elastomers (DPE) has successfully collaborated with Spansion Inc. Fab 25 in Austin, Texas, to evaluate a perfluoroelastomer O-ring product designed to help increase the uptime of semiconductor manufacturing equipment. The dramatic results enabled Spansion to create a step change in their preventative maintenance (PM) schedule that increased productivity and reduced the cost of ownership in the fab.
A recent problem occurred in the HDPCVD equipment at Fab 25 when
process gases (SiH4, O2, He) and cleaning chemistries (NF3 and O2 plasma-two stage) created an aggressive process environment. High particle count and leaks from seal erosion and compression set caused seal issues in IMD and STI processes. The scheduled maintenance cycle was 90 days but premature sealing issues occurred within 30-60 days. The incumbent O-ring performance issues were related to mechanical as well as chemical attack with plasma erosion.
Spansion <http://www.spansion.com/> turned to DuPont Performance Elastomers for material options to produce longer seal life with reduced particle generation. Proprietary technology held the key to the solution with a combination of innovative filler and crosslinking technology. After reviewing specifications and test results, product modifications were made and Kalrez® 9100 parts were produced for trials against other competitive products. Kalrez® 9100 parts outperformed the competitive products under all conditions. As evident from the extensive evaluation run by Spansion, the resulting product exhibited significantly less seal erosion, reduced particle generation and better elastic recovery characteristics. The life expectancy of the critical parts improved.
Currently, Kalrez® 9100 continues to exceed the normal Spansion PM schedule by up to 6 times longer, extending the 30-day PM out to 180 days, depending upon the seal location. Increased equipment availability has increased the fab production