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Aviza Receives Order for Celsior fxP ALD System From Leading Japanese Logic IC Manufacturer

   2007-11-28   点击:607

SCOTTS VALLEY, Calif.--(BUSINESS WIRE)--Nov. 27, 2007--Aviza Technology, Inc. (NASDAQ:AVZA), a supplier of advanced semIConductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced a new order for its Celsior fxP atomic layer deposition (ALD) system to a leading Logic integrated circuit (IC) manufacturer in Japan. This is a significant milestone as it marks Aviza's initial entry into the Logic arena with a leading Japanese custo

mer utilizing Aviza's next-generation ALD system. The tool will be used for Logic research and development (R&D) for high-k gate dielectrics and metal electrode films for the 45-nm node and below to manufacture system-on-chip (SoC) devices for high performance, leading-edge consumer applications.

 
    "Early engagement with customers is key. Our collaboration with this Japanese customer on advanced high-k and metal materials and process technologies for ALD will allow us to migrate seamlessly to production-scale, cost-effective manufacturing," said May Su, Vice President and General Manager, ALD and Thermal Business Unit of Aviza Technology, Inc. "This announcement validates Aviza's strategy of expanding our DRAM experience in ALD and leveraging this knowledge into the Flash and Logic arenas, which are now prepared to adopt ALD. We are pleased that our Celsior fxP ALD system was selected by our Japanese customer and look forward to supporting their current and future R&D and manufacturing requirements."

 
    Japan is an important region for the production of advanced Flash memory and Logic ICs. Aviza's Celsior fxP ALD system is a production proven tool and combined with Aviza's extensive process technology expertise, the Company's ALD offerings enable Japanese chipmakers to meet stringent film composition control, uniformity and repeatability that are critical requirements for ensuring the manufacturability and cost-effectivene

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