Filtration Solutions For 300mm High Performance REB Systems
300mm高性能REB系统的过滤方案
Albert Chen,GPS Manager, Liquid Microcontamination Asia,Entegris
随着更高制程技术的引进，关键颗粒变小，对于纳米级颗粒和金属离子污染的控制变得越发关键，而不同工艺状况下对于颗粒和金属污染控制的需求也不同，在不同的技术节点需要使用不同的过滤器；为了更好的清洗表面和避免污染，必须要使用高流量和高过滤效率的过滤器。通过一系列实验数据分析，新研发的特殊结构滤膜的小孔径过滤器也可以实现高流量，从而兼顾了过滤更小关键颗粒和实现高效清洗。
Speaker Bio.
Albert Chen (陳柏嘉) is the Global Product Support Manager for Liquid Microcontamination products in Entegris Asia. He joined Entegris in 2002 and
has
worked as the Application Specialist and Senior GPS Specialist. Prior to joining Entegris, he worked for Industrial Technology Research Institute as the associate researcher focusing on UPW manufacturing and recycling. He authored or co-authored several journal and conference papers about applications of artificial intelligence on the control of water treatment processes and about UPW manufacturing/recycling. He received his BS and MS degrees in Chemical Engineering from National Cheng Kung University in Taiwan.
Abstract:
As the technology advances, the requirement for particle control is becoming more and more stringent. For most of the wet processes, liquid filtration has been an indispensable part for contamination control. It is critically important to control the particles with the filtration of smaller pore size ratings in these technologies.
However, it has been well established that tighter filtration will result in higher pressure drop across the filter. As a result, the move to tighter filtration will introduce an effect to the flow rate in the REB system and compromise the particle control performances.
This presentation addresses the importance of optimizing the filtration rating and the system flow rate in the design phase of the REB system. This presentation also compares the simulated performances during design phase with the real performances in processes.
In the last part of the presentation, the development progresses of the new filter platform whic
h can satisfy both the retention efficiency and flow rate requirements simultaneously for the high performance REB systems in the future will also be described.
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[视频]：湿法制程多组分化学品的原位分析
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