Optimized Filter Priming Method to Minimize Maintenance Downtime
Traci Batchelder，Entegris, Inc
优化过滤器排泡过程减少维护保养的停机时间
- 半导体关键尺寸逐渐变小，要把缺陷密度控制在很低范围，可以在使用点终端使用小孔径的过滤器。
- 减少过滤器的排泡时间将会减少维护保养的时间和节省光刻化学试剂的消耗量，可以显著减低成本。
- 安装新过滤器，有3个区域需排泡：过滤器膜上游端；过滤器膜下游端；过滤器膜本身。
- 采用两级泵允许过滤和喷胶步骤分开；采用有效的方式“prime to vent“和”prime to purge“，使化学试剂进入过滤器，优化排泡过程和有效性。
Traci Batchelder is the Applications Development Engineer of Liquid Dispense at Entegris, Inc, since 2005.
Before joining Entegris, Traci was with FSI as Applications Engineer, Microlithography for 1.5 years. She worked in Photolithography Process for 7 years in National Semiconductor, Harris Semiconductor and Texas Instruments. Traci has a B.S. in Chemistry from University of Central Florida and M.A. in Chemistry from University of Texas.
Abstract:
With decreasing critical dimensions comes the need to control defect density to lower levels; which is often accomplished by employing smaller retention rated point-of-use filtration. Point-of-use filtration is of paramount importance as a final opportunity to prevent defects from being introduced onto the wafer surface. To deliver the best return on investment, these point-of-use filters need to be changed prior to end of life. Many companies are reluctant to perform filter change prior to failure due to chemical consumption and dispense point downtime issues. To address these issues, we have performed a series of designed experiments to evaluate the effect fluid flow rate and filtration pressure have on filter priming efficiency. The results of these experiments will be presented; including recommendations for priming sequences and optimal filtration pressure for priming based upon trends observed across pore size.
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